?
|
Material |
Purity |
Configurations |
|
Al & Al alloy |
5N, 5N5 |
NMC Oerlikon (Balzer) TM NEXX TM Aviza (Trikon) TM Tango TM AMAT TM |
|
Cu |
4N5,5N, 6N |
|
|
CuP |
3N5, 4N5,5N |
|
|
Ti |
4N5, 5N |
|
|
Ni |
4N, 4N5 |
|
|
NiV, NiPt |
3N5,4N |
|
|
WTi |
3N5,4N,4N5 |
|
|
Ag |
4N,5N |
|
|
Au |
4N, 5N |
|
|
Pt |
4N,5N |
